NANO 36
Affordable Glove Box Integrated Sputtering, Thermal or Low Temperature Evaporation System
| Magnetron Sputtering Sources | 3 |
| Thermal Evaporation Sources | 4 |
| Low Temperature Evaporation Sources (LTE) | 4 |
| Electron Beam Source | N/A |
| Platen |
150mm Substrates
|
| Load Lock | N/A |
| Software | Full eKLipse™ Control Software/Hardware Suite |
PRO Line PVD 75
Modular Design, Allowing Countless Configurations & Multiple Techniques in the Same Chamber
| Magnetron Sputtering Sources | 6 |
| Thermal Evaporation Sources | 4 |
| Low Temperature Evaporation Sources (LTE) | 2 |
| Electron Beam Source | Multi Pocket, 5kW or 10kW Power Supplies |
| Platen |
150mm Substrates
|
| Load Lock | Single or Multi-Cassette |
| Software | Full eKLipse™ Control Software/Hardware Suite |
PRO Line PVD 200
Larger Version of the PVD 75 Allowing More Ssources & Configurations
| Magnetron Sputtering Sources | 8 |
| Thermal Evaporation Sources | 6 |
| Low Temperature Evaporation Sources (LTE) | 2 |
| Electron Beam Source | Multi Pocket, 5kW or 10kW Power Supplies |
| Platen |
200mm Substrates
|
| Load Lock | Single or Multi-Cassette |
| Software | Full eKLipse™ Control Software/Hardware Suite |
AXXIS
Radial Deposition Ports & a Right-Angled Tilting Substrate Stage Facilitates Multiple Deposition Techniques
| Magnetron Sputtering Sources | 6 |
| Thermal Evaporation Sources | 3 |
| Low Temperature Evaporation Sources (LTE) | N/A |
| Electron Beam Source | Multi Pocket, 5kW or 10kW Power Supplies |
| Platen |
Tilting Fixture 200mm Substrates
|
| Load Lock | Single |
| Software | Full eKLipse™ Control Software/Hardware Suite |