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Horiba Scientific – Thin Film Analysis

Spectroscopic Ellipsometers

UVISEL – Spectroscopic Ellipsometer from FUV to NIR

The UVISEL Spectroscopic Phase Modulated Ellipsometer (SPME) is a unique instrument that incorporates photoelastic device to modulate the polarization without any mechanical movement. Owing to the phase modulation technology the UVISEL spectroscopic ellipsometer performs advanced measurements of the degree of polarization, anisotropy and Mueller Matrix elements.

  • High End Research Spectrometer
  • Spectroscopic Phase Modulated Ellipsometer
  • Highest precision and sensitivity
  • Wide spectral range : 190 to 2100 nm
  • Fully integrated spectroscopic ellipsometry software package
  • Four configurations: Extended Range, VIS, FUV, NIR
   

UVISEL2
Spectroscopic Phase Modulation Ellipsometry
High resolution scanning monochromator

The new UVISEL2 ellipsometer offers the best combination of modularity and performance for advanced thin film, surface and interface characterization.

Highest modulation frequency in the market (50 kHz)

Benefits:

  • The best signal to noise ratio
  • The most sensitive ellipsometer
  • No moving parts during the acquisition
  • No dead spots when ? is close to 0? and 180?
  • The only achromatic microspots in the market
  • No lenses used only mirrors
  • Largest spectral range with the microspot
  • Smallest spot size
  • Automatic selection of 8 spot sizes
  • Unique vision capabilities in the Market
  • The fastest acquition time with high spectral resolution
  • Materials Characterization from 190-2100nm
  • Optimized detections
  • PMT detection system for high sensitivity in FUV

 
   

Auto SE
Innovative Thin Film Measurement Tool

The Auto SE is a new thin film measurement tool that allows full automatic analysis of thin film samples with simple push button operation.

Sample analysis takes only a few seconds and provides a complete report that fully describes the thin film stack – including film thicknesses, optical constants, surface roughness, and film inhomogeneities.

The Auto SE is a highly featured instrument that includes an automatic XYZ stage, real-time imaging of the measurement site and automatic selection of spot size. Many accessories are available to suit a large range of applications.

The Auto SE includes built-in diagnostic indicators for the automatic detection and diagnosis of problems, with comprehensive operator guidance for troubleshooting.

The Auto SE stands out in its ease of use and numerous automatic features that made the Auto SE a turnkey instrument ideal for routine thin film measurement and device quality control.
   

Smart SE

Horiba Jobin Yvon’s economical alternative to the Auto SE.

  • Fast and Accurate:
    • The CCD detector of the Smart-SE acquires accurate ellipsometric data from 450 nm to 1000 nm in less than 1 second
  • Flexible:
    • The optical head of the Smart-SE are mounted on a compact manual angle of incidence that allows data acquisition from 35o to 90o by step of 5o
    • Fixed Sample holder
  • Versatile:
    • The Smart-SE can be upgraded with: 200 mm or 300 mm mapping stage for uniformity measurements Automated variable angle of incidence for complex analysis In-situ configuration for real time process monitoring
   
 

UVISEL 2 VUV

A versatile spectroscopic ellipsometer covering a range from VUV to NIR The UVISEL 2 VUV delivers the fastest thin film measurements over the largest wavelength range spanning from 147 nm to 2100 nm.
   

 

 In-Situ Ellipsometers

 

UVISEL In-Line Spectroscopic Ellipsometer

In-Line Spectroscopic Ellipsometer for Web Coater and Roll to Roll Systems

 
   
 

UVISEL In-Situ Spectroscopic Ellipsometer

In Situ Thin Film Process Control – Spectral Range from 190 to 2100 nm
   

 

 Large Area Mapping Ellipsometers for Flat Panel Display and Photovoltaic Industries

 

Large Area Mapping Ellipsometers for Flat Panel Display and Photovoltaic Industries

HORIBA Scientific’s large area spectroscopic ellipsometers are designed to provide thin film control solutions in flat panel display and photovoltaic manufacturing.

A large mapping system allows thin film measurements at every location on the panel. Our large area spectroscopic ellipsometers are driven by our DeltaPsi2 software platform, which provides reliable recipes for routine thin film measurements. Automatic recipes fully automate measurement+modelling+mapping+results. Automatic reporting, data reprocessing, import/export package are some of the many functionalities of DeltaPsi2.

HORIBA Scientific’s ellipsometers deliver the highest quality thin film measurements on glass sheets and flexible substrates.

The large area thin film metrology system are designed to fulfill all of your application requirements.

Contact us for more information.
   

 

Large Area Metrology Platforms for Display Industry

FF-1000 – Automatic Spectroscopic Ellipsometer
Spectral range: 190 – 830 nm

The FF-1000 automatic spectroscopic ellipsometer was specifically designed for the display industry and is able to handle up to 5th generation glass substrate. The FF-1000 allows accurate and fast characterization of thickness, optical constants and uniformity for advanced display device applications. It also supports production processes for next generation FPDs such as low-temperature polysilicon in TFT (Thin Film Transistors) and organic EL (Organic Electro Luminescence) processes.

  • Highest accuracy for display applications
  • Up to 5th flat panel display substrate
  • Advanced automation features
  • Optional spectroscopic reflectometer
  • Integrated software platform
   
 

DigiScreen – Spectroscopic Reflectometer Platform
Spectral Range 400 – 800 nm

The DIGISCREEN is an automated Spectroscopic Reflectometer platform ideally suited for R&D and pilot production of flat panel displays. Its unique compact design provides a sample holder almost vertical allowing easier integration and a smaller footprint and is able to handle up to 7th generation substrates.

  • Automated UV-VIS spectroscopic reflectometer platform ideally suited for R&D and pilot production of flat panel displays
  • Up to 7th generation flat panel display substrates
  • Unique vertical design
  • Fast film thickness uniformity mapping
  • Simple automatic operations