The Most Advanced Active Vibration Isolation System for Semiconductor/FPD Manufacturing

• Designed to support semiconductor inspection equipment

• Active pneumatic vibration isolation mount platforms

• Powerful  active pneumatic servo valve actuators

• Support linear XY stages

• Support up to 50,000 kg

• Superior active vibration isolation performance

• Feedback & Feed-forward Control Systems

Active Vibration Isolation Base Platform for Ultra-Sensitive Measuring Equipment

• 90% isolation at 2 Hz, 99% isolation at 10 Hz
• Support up to 6000 kg
• Feedback & Feed-forward Control Systems
• Compatible with all commercial electron microscopes
• Custom-made Platform is available 

Hybrid Active Optical Table

• Optical table platform

• 90% Isolation at 2 Hz, 99% Isolation at 10 Hz

• Support up to 6000 kg

• Feedback & Feed-forward Control Systems

• Customization is available 

Desk Active Vibration Isolation Platform  

• Desk platform 

• Ergonomic design for seated users

• 90% isolation at 5 Hz, 98% Isolation at 10 Hz

• Feedback & Feed-forward Control Systems

• Support up to 700 kg

• Ideal for vibration-sensitive inspection systems

Base Active Isolation Platform

• Base platform

• Low-profile type

• 90% isolation at 5 Hz, 99% Isolation at 10 Hz

• Feedback & Feed-forward Control Systems

• Support up to 700 kg 

• Customization is available

Tabletop Active Isolation Platform

• Tabletop platform

• Plug N play (No air, Only AC power required)

• Compact & light weight design

• 90% isolation at 5 Hz, 99% isolation at 10 Hz

• Feedback & Feed-forward Control Systems

• Support up to 150kg