DVIA-P Series
The Most Advanced Active Vibration Isolation System for Semiconductor/FPD Manufacturing
Designed to support semiconductor inspection equipment
Active pneumatic vibration isolation mount platforms
Powerful active pneumatic servo valve actuators
Support linear XY stages
Support up to 50,000 kg
Superior active vibration isolation performance
Feedback & Feed-forward Control Systems
DVIA-MB Series
Active Vibration Isolation Base Platform for Ultra-Sensitive Measuring Equipment
- 90% isolation at 2 Hz, 99% isolation at 10 Hz
- Support up to 6000 kg
- Feedback & Feed-forward Control Systems
- Compatible with all commercial electron microscopes
- Custom-made Platform is available
DVIA-MO Series
Hybrid Active Optical Table
Optical table platform
90% Isolation at 2 Hz, 99% Isolation at 10 Hz
Support up to 6000 kg
Feedback & Feed-forward Control Systems
Customization is available
DVIA-UD Series
Desk Active Vibration Isolation Platform
Desk platform
Ergonomic design for seated users
90% isolation at 5 Hz, 98% Isolation at 10 Hz
Feedback & Feed-forward Control Systems
Support up to 700 kg
Ideal for vibration-sensitive inspection systems
DVIA-UB Series
Base Active Isolation Platform
Base platform
Low-profile type
90% isolation at 5 Hz, 99% Isolation at 10 Hz
Feedback & Feed-forward Control Systems
Support up to 700 kg
Customization is available
.
DVIA-T Series
Tabletop Active Isolation Platform
Tabletop platform
Plug N play (No air, Only AC power required)
Compact & light weight design
90% isolation at 5 Hz, 99% isolation at 10 Hz
Feedback & Feed-forward Control Systems
Support up to 150kg
.