 | Denton’s Discovery® HDG is a complete, turnkey system that offers all the features and versatility needed for wide ranging development and production applications – a significantly better value than competitive systems. System Features/Benefits Turn-Key Process Packages For: - Ion Beam Deposition & IonBeam Assisted Deposition
- High density films• Environmental stability
- Stable deposition rates• Stoichiometry control
- Ion Beam Etch &Reactive Ion Beam Etch
- Excellent etch uniformity
Wide Range of Options: - Ion Sources
- Substrate Fixturing
- End-point Control
- RGA
- Process Automation
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